JPH0290843U - - Google Patents
Info
- Publication number
- JPH0290843U JPH0290843U JP17020788U JP17020788U JPH0290843U JP H0290843 U JPH0290843 U JP H0290843U JP 17020788 U JP17020788 U JP 17020788U JP 17020788 U JP17020788 U JP 17020788U JP H0290843 U JPH0290843 U JP H0290843U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- tank
- cup
- top surface
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170207U JPH0425704Y2 (en]) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170207U JPH0425704Y2 (en]) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290843U true JPH0290843U (en]) | 1990-07-18 |
| JPH0425704Y2 JPH0425704Y2 (en]) | 1992-06-19 |
Family
ID=31460952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988170207U Expired JPH0425704Y2 (en]) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425704Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63168026A (ja) * | 1986-12-29 | 1988-07-12 | Tokyo Electron Ltd | 現像方法 |
-
1988
- 1988-12-30 JP JP1988170207U patent/JPH0425704Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63168026A (ja) * | 1986-12-29 | 1988-07-12 | Tokyo Electron Ltd | 現像方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425704Y2 (en]) | 1992-06-19 |